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Development of a high-speed impedance measurement system for dual-frequency capacitive-coupled pulsed-plasma Lee, Hohyoung; Lee, Jeongbeom; Park, Gijung; Han, Yunseok; Lee, Youngwook; Cho, Gunhee; Kim, Hanam; et al, REVIEW OF SCIENTIFIC INSTRUMENTS, v.86, no.8, pp.083505, 2015-08 |
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