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The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Young; You, Dong-Joo; Ahn, Seh-Won; et al, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03 |
전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구 = Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcherlink 김용진; Kim, Yong-Jin; et al, 한국과학기술원, 1995 |
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