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High-accuracy digital-to-analog actuators using load springs compensating fabrication errors Han, Won; Lee, Won-Chul; Cho, Young-Ho, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.16, no.3, pp.528 - 536, 2007-06 |
High-Precision Digital-to-Analog Tunable Capacitors With Improved Quality Factor Using a Parallel Digital Actuator Array Han, Won; Cho, Young-Ho, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, pp.773 - 783, 2009-08 |
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