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Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass Ko Jong Soo; Cho, Young-Ho; Kwak Byung Man; Park Kwanhum, Inter. Mechanical Engineering Congress and Exposition(IMECE '98), ASME, v.66, pp.353 - 356, 1998-11-15 |
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