증착조건이 Si 증착속도 및 증착층의 표면형상에 미치는 영향에 대한 연구Effect of deposition conditionson the deposition rate and the crystal morphology of silicon deposit
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Sung-Soon | - |
| dc.contributor.author | 조준형 | - |
| dc.contributor.author | Cho, Joon-Hyoung | - |
| dc.date.accessioned | 2011-12-15T01:51:54Z | - |
| dc.date.available | 2011-12-15T01:51:54Z | - |
| dc.date.issued | 1983 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63934&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51942 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iv], 60 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Surface reaction. | - |
| dc.subject | 표면 반응. | - |
| dc.subject | 열적 활성화 과정. | - |
| dc.title | 증착조건이 Si 증착속도 및 증착층의 표면형상에 미치는 영향에 대한 연구 | - |
| dc.title.alternative | Effect of deposition conditionson the deposition rate and the crystal morphology of silicon deposit | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 63934/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000811267 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Sung-Soon | - |
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