단결정 Si 표면에의 $Al_2O_3$ 화학증착에 있어서 반응변수가 증착속도 및 표면형상에 미치는 영향에 대한 연구The effects of deposition variables on deposition rate & morphology in the chemical vapor deposition of $Al_2O_3$ onto silicon single crystal
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 김철 | - |
| dc.contributor.author | Kim, Chul | - |
| dc.date.accessioned | 2011-12-15T01:51:37Z | - |
| dc.date.available | 2011-12-15T01:51:37Z | - |
| dc.date.issued | 1983 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63915&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51923 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iii], 48 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Single crystal. | - |
| dc.subject | Supersaturation. | - |
| dc.subject | 표면 반응. | - |
| dc.subject | 반응 변수. | - |
| dc.title | 단결정 Si 표면에의 $Al_2O_3$ 화학증착에 있어서 반응변수가 증착속도 및 표면형상에 미치는 영향에 대한 연구 | - |
| dc.title.alternative | The effects of deposition variables on deposition rate & morphology in the chemical vapor deposition of $Al_2O_3$ onto silicon single crystal | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 63915/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000811069 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
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