Vinyl tetrahydropyranyl ether-vinyl p-tetrahydropyranyloxy benzal-vinyl p-hydroxybenzal-vinyl acetate 의 합성과 리소그라피 특성Synthesis and lithographic charaterization of vinyl tetrahydropyranyl ether-vinyl p-tetrahydropyranyloxy benzal-vinyl p-hydroxybenzal-vinyl acetate
- Advisors
- 김진백researcher; Kim, Jin-Baekresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 109064/325007 / 000947504
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 신소재공학과, 1996.2, [ vii, 72 p. ]
- Keywords
아세탈; 리소그라피 특성; 포토레지스트; Photoresist; Pyran; Acetal; Lithographic characterization
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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