폴리이미드 위에 스퍼터 증착한 Cr 및 Cu 박막의 잔류응력에 관한 연구A study on the residual stress of Cr & Cu thin films sputtered onto polyimide
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 유진 | - |
| dc.contributor.advisor | Yu, Jin | - |
| dc.contributor.author | 김관수 | - |
| dc.contributor.author | Kim, Kwan-Soo | - |
| dc.date.accessioned | 2011-12-15T01:45:41Z | - |
| dc.date.available | 2011-12-15T01:45:41Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=107105&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51564 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 1996.2, [ v, 58 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 미세구조 | - |
| dc.subject | 전처리 | - |
| dc.subject | 잔류응력 | - |
| dc.subject | Adhesion | - |
| dc.subject | Grain-like crack | - |
| dc.subject | RF treatment | - |
| dc.subject | Residual stress | - |
| dc.title | 폴리이미드 위에 스퍼터 증착한 Cr 및 Cu 박막의 잔류응력에 관한 연구 | - |
| dc.title.alternative | A study on the residual stress of Cr & Cu thin films sputtered onto polyimide | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 107105/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 000947003 | - |
| dc.contributor.localauthor | 김관수 | - |
| dc.contributor.localauthor | Kim, Kwan-Soo | - |
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