CZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구GETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer

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dc.contributor.advisor유진-
dc.contributor.advisorYu, Jin-
dc.contributor.author조규철-
dc.contributor.authorCho, Kyoo-Chul-
dc.date.accessioned2011-12-15T01:45:21Z-
dc.date.available2011-12-15T01:45:21Z-
dc.date.issued1993-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69618&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/51543-
dc.description학위논문(석사) - 한국과학기술원 : 신소재공학과, 1993, [ ii, 75 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.titleCZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구-
dc.title.alternativeGETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer-
dc.typeThesis(Master)-
dc.identifier.CNRN69618/325007-
dc.description.department한국과학기술원 : 신소재공학과, 1993-
dc.identifier.uid000927094-
dc.contributor.localauthor조규철-
dc.contributor.localauthorCho, Kyoo-Chul-
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MS-Theses_Master(석사논문)
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