CZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구GETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 유진 | - |
| dc.contributor.advisor | Yu, Jin | - |
| dc.contributor.author | 조규철 | - |
| dc.contributor.author | Cho, Kyoo-Chul | - |
| dc.date.accessioned | 2011-12-15T01:45:21Z | - |
| dc.date.available | 2011-12-15T01:45:21Z | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69618&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51543 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 1993, [ ii, 75 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | CZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구 | - |
| dc.title.alternative | GETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 69618/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, 1993 | - |
| dc.identifier.uid | 000927094 | - |
| dc.contributor.localauthor | 조규철 | - |
| dc.contributor.localauthor | Cho, Kyoo-Chul | - |
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