열 필라멘트법으로 제조한 다이아몬드 박막의 미세구조 제어 및 표면연마에 관한 연구A study on the microstructure controll and surface ppolishing of diamond film deposited b y hot-filament CVD

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dc.contributor.advisor최시경-
dc.contributor.advisorChoi, Si-Kyung-
dc.contributor.author정상기-
dc.contributor.authorJeong, Sang-Ki-
dc.date.accessioned2011-12-15T01:45:01Z-
dc.date.available2011-12-15T01:45:01Z-
dc.date.issued1994-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69497&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/51522-
dc.description학위논문(석사) - 한국과학기술원 : 무기재료공학과, 1994.2, [ 69 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.title열 필라멘트법으로 제조한 다이아몬드 박막의 미세구조 제어 및 표면연마에 관한 연구-
dc.title.alternativeA study on the microstructure controll and surface ppolishing of diamond film deposited b y hot-filament CVD-
dc.typeThesis(Master)-
dc.identifier.CNRN69497/325007-
dc.description.department한국과학기술원 : 무기재료공학과, -
dc.identifier.uid000923451-
dc.contributor.localauthor정상기-
dc.contributor.localauthorJeong, Sang-Ki-
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MS-Theses_Master(석사논문)
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