상온 RF 반응 스퍼터링법으로 제조한 수소화 비정질 탄화규소 박막의 광학적 성질 및 열처리후 광학적 특성 변화 연구A study on the characteristics of the optical properties in as-deposited and post annealed hydrogenated amorphous silicon carbide films prepared by RF reactive sputtering at room temperature
- Advisors
- 권혁상researcher; Kwon, Hyuk-Sangresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60405/325007 / 000901582
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1992.2, [ vi, 62 p. ]
- Keywords
탄화 규소
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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