RF 마그네트론 스퍼터링법에 의하여 증착한 AlN와 ZnO 박막의 성장기구에 관한 투과전자현미경 연구A TEM study on the growth mechanisms of AlN and ZnO thin films by RF magnetron sputterring
- Advisors
- 이정용researcher; Lee, Jeong-Yongresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99506/325007 / 000933515
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 81 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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