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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Theses_Master(석사논문)

구리 박막의 건식 플라즈마 식각에 관한 연구A study of plasma dry etching of copper film

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박홍배 / Park, Hong-Bae
Advisors
이정용researcher; Lee, Jeong-Yongresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
99492/325007 / 000933223
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 59 p. ]

URI
http://hdl.handle.net/10203/51269
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99492&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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