CVD Cu 박막의 특성에 열처리 온도가 미치는 영향The effects of the annealed temperature on properties of CVD Cu films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 민재식 | - |
| dc.contributor.author | Min, Jae-Sik | - |
| dc.date.accessioned | 2011-12-15T01:40:51Z | - |
| dc.date.available | 2011-12-15T01:40:51Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99489&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51266 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 63 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Chemical vapor deposition | - |
| dc.title | CVD Cu 박막의 특성에 열처리 온도가 미치는 영향 | - |
| dc.title.alternative | The effects of the annealed temperature on properties of CVD Cu films | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99489/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933180 | - |
| dc.contributor.localauthor | 민재식 | - |
| dc.contributor.localauthor | Min, Jae-Sik | - |
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