비정질 $Ta_2O_5$ 박막의 결정화 및 결함 분석에 관한 연구A study on the crystallization of amorphus $Ta_2O_5$ thin films and defect analysis
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정용 | - |
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.author | 이후영 | - |
| dc.contributor.author | Lee, Hoo-Yeong | - |
| dc.date.accessioned | 2011-12-15T01:40:26Z | - |
| dc.date.available | 2011-12-15T01:40:26Z | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68565&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51239 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1993.2, [ [iv], 69 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 비정질 $Ta_2O_5$ 박막의 결정화 및 결함 분석에 관한 연구 | - |
| dc.title.alternative | A study on the crystallization of amorphus $Ta_2O_5$ thin films and defect analysis | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 68565/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000911486 | - |
| dc.contributor.localauthor | 이후영 | - |
| dc.contributor.localauthor | Lee, Hoo-Yeong | - |
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