Glue layer TiW sputtering 조건이 저압 화학 증착 방법에 의해 증착된 텅스텐 박막의 성질에 미치는 영향에 관한 연구A study on the effect of sputtering conditions of glue layer TiW on the properties of LPCVD-W films
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 전자재료공학과 ,
- Publisher
- 한국과학기술원
- Issue Date
- 1993
- Identifier
- 68555/325007 / 000911275
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과 , 1993.2, [ [iii], 62 p. ]
- Keywords
Chemical vapor deposition.
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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