화학증착법에 의한 $ZrO_2$ 박막의 제조 및 반응변수에 따른 증착특성The fabrication of the $ZrO_2$ thin film by chemical vapor deposition and the effect of the reaction parameters on the deposition characteristics
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 67554/325007 / 000881512
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ iii, 57 p. ]
- Keywords
Deposition rate; 증착 속도
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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