플라즈마 화학증착법에 의한 Ti(C,N)의 증착기구 및 증착층의 특성에 관한 연구A study on the deposition mechanism and structural properties of Ti(C,N) deposited by plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 남수우 | - |
| dc.contributor.advisor | Nam, Soo-Woo | - |
| dc.contributor.author | 김상호 | - |
| dc.contributor.author | Kim, Sang-Ho | - |
| dc.date.accessioned | 2011-12-15T01:38:50Z | - |
| dc.date.available | 2011-12-15T01:38:50Z | - |
| dc.date.issued | 1989 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=66993&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51140 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ iv, 80 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 증착 변수. | - |
| dc.title | 플라즈마 화학증착법에 의한 Ti(C,N)의 증착기구 및 증착층의 특성에 관한 연구 | - |
| dc.title.alternative | A study on the deposition mechanism and structural properties of Ti(C,N) deposited by plasma enhanced chemical vapor deposition | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 66993/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000871066 | - |
| dc.contributor.localauthor | 남수우 | - |
| dc.contributor.localauthor | Nam, Soo-Woo | - |
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