비정질 $Si_3N_4$ 박막의 화학증착과 계면전하 특성에 관한 연구A study on chemical vapor deposition of amorphous $Si_3N_4$ thin film and the characteristics of interface charge
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Sung-Soon | - |
| dc.contributor.author | 박흥락 | - |
| dc.contributor.author | Park, Heung-Lak | - |
| dc.date.accessioned | 2011-12-15T01:37:07Z | - |
| dc.date.available | 2011-12-15T01:37:07Z | - |
| dc.date.issued | 1986 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=65409&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51033 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1986.2, [ [iii], 55 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Surface reactions. | - |
| dc.title | 비정질 $Si_3N_4$ 박막의 화학증착과 계면전하 특성에 관한 연구 | - |
| dc.title.alternative | A study on chemical vapor deposition of amorphous $Si_3N_4$ thin film and the characteristics of interface charge | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 65409/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000841136 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Sung-Soon | - |
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