Polyimide 위에 스퍼터 증착한 Cu 및 Cr 박막의 잔류응력에 관한 연구A study on the residual stress of sputter-deposited Cu and Cr thin films on polyimide
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 유진 | - |
| dc.contributor.advisor | Yu, Jin | - |
| dc.contributor.author | 조성일 | - |
| dc.contributor.author | Cho, Sung-Il | - |
| dc.date.accessioned | 2011-12-15T01:33:26Z | - |
| dc.date.available | 2011-12-15T01:33:26Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165448&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50808 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ vi, 41 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 폴리이미드 | - |
| dc.subject | 잔류응력 | - |
| dc.subject | 곡률 | - |
| dc.subject | curvature | - |
| dc.subject | polyimide | - |
| dc.subject | residual stress | - |
| dc.title | Polyimide 위에 스퍼터 증착한 Cu 및 Cr 박막의 잔류응력에 관한 연구 | - |
| dc.title.alternative | A study on the residual stress of sputter-deposited Cu and Cr thin films on polyimide | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 165448/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000993521 | - |
| dc.contributor.localauthor | 유진 | - |
| dc.contributor.localauthor | Yu, Jin | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.