ECR-PEMOCVD법으로 제조한 $SrTiO_3$ 박막의 단차 피복성에 관한 연구A study on the step coverage of $SrTiO_3$ thin films fabricated using ECR-PEMOCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 박순연 | - |
| dc.contributor.author | Park, Soon-Yon | - |
| dc.date.accessioned | 2011-12-15T01:32:57Z | - |
| dc.date.available | 2011-12-15T01:32:57Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158606&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50779 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ vii, 67 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 단차 피복성 | - |
| dc.subject | ECR-PEMOCVD | - |
| dc.subject | 조성 | - |
| dc.subject | Composition | - |
| dc.subject | Step coverage | - |
| dc.subject | ECR-PEMOCVD | - |
| dc.title | ECR-PEMOCVD법으로 제조한 $SrTiO_3$ 박막의 단차 피복성에 관한 연구 | - |
| dc.title.alternative | A study on the step coverage of $SrTiO_3$ thin films fabricated using ECR-PEMOCVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 158606/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000983215 | - |
| dc.contributor.localauthor | 노광수 | - |
| dc.contributor.localauthor | No, Kwang-Soo | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.