DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 안병태 | - |
dc.contributor.advisor | Ahn, Byung-Tae | - |
dc.contributor.author | 김성철 | - |
dc.contributor.author | Kim, Sung-Chul | - |
dc.date.accessioned | 2011-12-15T01:32:42Z | - |
dc.date.available | 2011-12-15T01:32:42Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158591&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50764 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ ii, 72 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 코발트실리사이드 | - |
dc.subject | 에피텍셜 | - |
dc.subject | 산화속도론 | - |
dc.subject | 성장속도론 | - |
dc.subject | Growth | - |
dc.subject | Epitaxial | - |
dc.subject | Kinetics | - |
dc.subject | Oxidation | - |
dc.title | 에피텍셜 $CoSi_2$층의 (100)Si 기판에서의 성장속도론 및 산화속도론 | - |
dc.title.alternative | Growth kinetics and oxidation kinetics of epitaxial $CoSi_2$ layer on (100)Si substrate | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 158591/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000983096 | - |
dc.contributor.localauthor | 안병태 | - |
dc.contributor.localauthor | Ahn, Byung-Tae | - |
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