Molybdenum을 이용한 photomask blank 재료에 관한 연구A study on the photomask blank material based on molybdenum
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 문성용 | - |
| dc.contributor.author | Moon, Seong-Yong | - |
| dc.date.accessioned | 2011-12-15T01:31:56Z | - |
| dc.date.available | 2011-12-15T01:31:56Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150063&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50717 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv, 79 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 크롬 | - |
| dc.subject | 흡수층 | - |
| dc.subject | 몰리브덴 | - |
| dc.subject | 포토마스크 | - |
| dc.subject | 건식식각 | - |
| dc.subject | Dry etch | - |
| dc.subject | Chromium | - |
| dc.subject | Absorber | - |
| dc.subject | Molybdenum | - |
| dc.subject | Photomask | - |
| dc.title | Molybdenum을 이용한 photomask blank 재료에 관한 연구 | - |
| dc.title.alternative | A study on the photomask blank material based on molybdenum | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150063/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000973238 | - |
| dc.contributor.localauthor | 노광수 | - |
| dc.contributor.localauthor | No, Kwang-Soo | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.