상부 전극 증착 조건이 $Pb(Zr,Ti)O_3$ 박막의 전기적 특성에 미치는 영향The effects of deposition conditions of top elctrodes on the electrical properties of $Pb(Zr,Ti)O_3$ thin films

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dc.contributor.advisor이원종-
dc.contributor.advisorLee, Won-Jong-
dc.contributor.author이강운-
dc.contributor.authorLee, Kang-Woon-
dc.date.accessioned2011-12-15T01:31:47Z-
dc.date.available2011-12-15T01:31:47Z-
dc.date.issued1999-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150054&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50708-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ ix, 87 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject백금-
dc.subject상부 전극-
dc.subjectPZT 박막-
dc.subject강유전체-
dc.subject수소 유기 열화-
dc.subjectHydrogen-induced degradation-
dc.subjectPt-
dc.subjectTop electrode-
dc.subjectPZT film-
dc.subjectFerroelectrics-
dc.title상부 전극 증착 조건이 $Pb(Zr,Ti)O_3$ 박막의 전기적 특성에 미치는 영향-
dc.title.alternativeThe effects of deposition conditions of top elctrodes on the electrical properties of $Pb(Zr,Ti)O_3$ thin films-
dc.typeThesis(Master)-
dc.identifier.CNRN150054/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000963420-
dc.contributor.localauthor이원종-
dc.contributor.localauthorLee, Won-Jong-
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