In-situ radio-frequency 세정에 의한 $TiSi_2$ 연구A study of $TiSi_2$ formation by in-situ radio-frequency cleaning
- Advisors
- 이정용researcher; Lee, Jeong-Yongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 133548/325007 / 000963288
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ iii, 95 p. ]
- Keywords
자연산화막; 급속열처리; 티타늄 실리사이드; Radio-frequence 세정; RF cleaning; Native oxide; RTA
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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