Pd게이트 MOS센서의 수소검지특성에 박막성질이 미치는 영향The effect of the thin film properties on the hydrogen sensing performance of Pd gate MOS sensor
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113161/325007 / 000953639
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ ii, 63 p. ]
- Keywords
박막; 수소; MOS 센서; Pd gate; Pd gate; Thin film; Adsorption; Hydrogen; MOS sensor
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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