코스퍼터링 $TiSi_2$ 박막의 상변태(C49→C54)와 응력해석Phase transformation (C49→C54) of $TiSi_2$ Co-Sputtered thin film and stress analysis
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박중근 | - |
| dc.contributor.advisor | Park, Joong-Keun | - |
| dc.contributor.author | 김종환 | - |
| dc.contributor.author | Kim, Jong-Hwan | - |
| dc.date.accessioned | 2011-12-15T01:30:18Z | - |
| dc.date.available | 2011-12-15T01:30:18Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113133&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50619 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 64 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 응력 | - |
| dc.subject | 변태 온도 | - |
| dc.subject | 타이타늄실리사이드 | - |
| dc.subject | 코스퍼터링 | - |
| dc.subject | 면저항 | - |
| dc.subject | Sheet resistance | - |
| dc.subject | Stress | - |
| dc.subject | Transformation temperature | - |
| dc.subject | TiSi2 | - |
| dc.subject | Cosputtering | - |
| dc.title | 코스퍼터링 $TiSi_2$ 박막의 상변태(C49→C54)와 응력해석 | - |
| dc.title.alternative | Phase transformation (C49→C54) of $TiSi_2$ Co-Sputtered thin film and stress analysis | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113133/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953118 | - |
| dc.contributor.localauthor | 박중근 | - |
| dc.contributor.localauthor | Park, Joong-Keun | - |
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