미세결정질을 함유한 수소화된 비정질 실리콘(a-Si:H) 박막의 결정화 거동에 관한 연구A study on the crystallization behavior of hydrogenated amorphous silicon (a-Si:H) films containing microcrystalline silicon(μc-Si)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이재영 | - |
| dc.contributor.advisor | Lee, Jai-Young | - |
| dc.contributor.author | 김건옥 | - |
| dc.contributor.author | Kim, Kun-Ok | - |
| dc.date.accessioned | 2011-12-15T01:29:54Z | - |
| dc.date.available | 2011-12-15T01:29:54Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106607&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50595 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 63 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 결정화 | - |
| dc.subject | 수소화된 미세결정질 실리콘 | - |
| dc.subject | 박막 트랜지스터 | - |
| dc.subject | TFT | - |
| dc.subject | Crystallization | - |
| dc.subject | Hydrogenated microcrystalline silicon(c-Si) | - |
| dc.title | 미세결정질을 함유한 수소화된 비정질 실리콘(a-Si:H) 박막의 결정화 거동에 관한 연구 | - |
| dc.title.alternative | A study on the crystallization behavior of hydrogenated amorphous silicon (a-Si:H) films containing microcrystalline silicon(μc-Si) | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106607/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000943039 | - |
| dc.contributor.localauthor | 이재영 | - |
| dc.contributor.localauthor | Lee, Jai-Young | - |
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