MBE 방법으로 증착된 $Si_{1-x}Ge_x$ 박막의 응력완화에 관한 연구A study on the strain relaxation of $Si_{1-x}Ge_x$ thin deposited using molecular beam epitaxy
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 임정욱 | - |
| dc.contributor.author | Lim, Jung-Wook | - |
| dc.date.accessioned | 2011-12-15T01:29:51Z | - |
| dc.date.available | 2011-12-15T01:29:51Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106601&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50592 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 77 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 응력 완화 | - |
| dc.subject | 분자선 에피텍시 | - |
| dc.subject | 바이어스에 의한 분자선 에피텍시 | - |
| dc.subject | Potential enhanced MBE | - |
| dc.subject | Strain relaxation | - |
| dc.subject | MBE | - |
| dc.title | MBE 방법으로 증착된 $Si_{1-x}Ge_x$ 박막의 응력완화에 관한 연구 | - |
| dc.title.alternative | A study on the strain relaxation of $Si_{1-x}Ge_x$ thin deposited using molecular beam epitaxy | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106601/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000943473 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
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