플라즈마 화학증착법으로 제조한 비정질 실리콘박막의 결정화 거동에 미치는 수소의 영향Hydrogen effects on the behavior of crystallization of amorphous silicon films prepared by plasma enhanced chemical vapor deposition
- Advisors
- 이재영; Lee, Jae-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99471/325007 / 000933144
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1995.2, [ 75 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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