분할 화학증착방법으로 증착된 알루미늄 박막의 선택성 및 표면 morphology 개선에 관한 연구A study on the improvement of the selectivity and surface morphology of al thin film by cycle chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 안상덕 | - |
| dc.contributor.author | Ahn, Seong-Deok | - |
| dc.date.accessioned | 2011-12-15T01:06:33Z | - |
| dc.date.available | 2011-12-15T01:06:33Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=162861&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50394 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2000.8, [ iv, 111 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 분할 화학증착방법으로 증착된 알루미늄 박막의 선택성 및 표면 morphology 개선에 관한 연구 | - |
| dc.title.alternative | A study on the improvement of the selectivity and surface morphology of al thin film by cycle chemical vapor deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 162861/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000945227 | - |
| dc.contributor.localauthor | 안상덕 | - |
| dc.contributor.localauthor | Ahn, Seong-Deok | - |
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
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