구리확산방지막용 질화텅스텐 박막의 열적 안정성과 미세구조Thermal stabilities and microstructures of $WN_x$ films as a Cu diffusion barrier
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 서봉석 | - |
| dc.contributor.author | Suh, Bong-Seok | - |
| dc.date.accessioned | 2011-12-15T01:06:24Z | - |
| dc.date.available | 2011-12-15T01:06:24Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=157707&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50385 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2000.2, [ iv, 101 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 금속배선 | - |
| dc.subject | 질화텅스텐 | - |
| dc.subject | 확산방지막 | - |
| dc.subject | 구리 | - |
| dc.subject | Cu | - |
| dc.subject | Metallization | - |
| dc.subject | WN | - |
| dc.subject | Tungsten nitride | - |
| dc.subject | Diffusion barrier | - |
| dc.title | 구리확산방지막용 질화텅스텐 박막의 열적 안정성과 미세구조 | - |
| dc.title.alternative | Thermal stabilities and microstructures of $WN_x$ films as a Cu diffusion barrier | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 157707/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000965195 | - |
| dc.contributor.localauthor | 서봉석 | - |
| dc.contributor.localauthor | Suh, Bong-Seok | - |
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