얇고 평활한 PZT 나노박막의 제조와 특성 분석Fabrication and characterization of thin and smooth PZT nano films

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Advisors
노광수researcherNo, Kwang-Sooresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2002
Identifier
177287/325007 / 000985189
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.8, [ ix, 155 p. ]

Keywords

특성 열화; 표면 거칠기; PZT; 나노박막; 압전성; Piezoelectric property; Degradation of properties; Surface roughness; PZT; Nano film

URI
http://hdl.handle.net/10203/50273
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=177287&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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