학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.2, [ x, 116 p. ]
열용량; 열전도도; 열구동체; 미소전자기계시스템; 비저항온도비례상수; Temperature coefficient of resistivity; Thermal capacitance; Thermal conductance; Thermal actuator; MEMS
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