화학증착법으로 제조한 다이아몬드막에서의 잔류응력에 관한 연구A study of residual stresses on CVD diamond films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 유진 | - |
| dc.contributor.advisor | Yu, Jin | - |
| dc.contributor.author | 김정근 | - |
| dc.contributor.author | Kim, Jung-Geun | - |
| dc.date.accessioned | 2011-12-15T01:03:28Z | - |
| dc.date.available | 2011-12-15T01:03:28Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143448&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50210 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ viii, 106 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 수소농도 | - |
| dc.subject | 잔류응력 | - |
| dc.subject | 다이아몬드 | - |
| dc.subject | 화학증착법 | - |
| dc.subject | 라만분석 | - |
| dc.subject | Raman spectroscopy | - |
| dc.subject | Hydrogen concentration | - |
| dc.subject | Residual stress | - |
| dc.subject | Diamond | - |
| dc.subject | CVD | - |
| dc.title | 화학증착법으로 제조한 다이아몬드막에서의 잔류응력에 관한 연구 | - |
| dc.title.alternative | A study of residual stresses on CVD diamond films | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 143448/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000939001 | - |
| dc.contributor.localauthor | 김정근 | - |
| dc.contributor.localauthor | Kim, Jung-Geun | - |
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