RF magnetron sputtering 법으로 제조한 $(Ba,Sr)TiO_3$ 박막의 물성 및 특성평가에 관한 연구Preparations and characterization of $(Ba,Sr)TiO_3$ thin films by RF magnetron sputtering
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 101894/325007 / 000905384
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1995.8, [ iv, 153 p. ]
- Keywords
상 형성; 전기적 특성; 하부전극; 유전상수; Electrical Properties; Pt Electrode; BST; RF Magnetron Sputtering
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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