플라즈마 화학증착법으로 제조한 수소화된 비정질 탄화규소의 증착 특성 및 물성에 관한 연구A study on the deposition characteristics and physical properties of hydrogenated amorphous silicon carbide films prepared by plasma enhanced CVD
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69017/325007 / 000885169
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1994.2, [ vii, 171 p. ]
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.