PEVED 법에 의한 μC-Si:H 박막의 성장과 a-Si 박막의 고상결정화Growth of μC-Si films and solid phase recrystallization of a-Si films deposited by PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 임호빈 | - |
| dc.contributor.advisor | Im, Ho-Bin | - |
| dc.contributor.author | 문대규 | - |
| dc.contributor.author | Moon, Dae-Gyu | - |
| dc.date.accessioned | 2011-12-15T01:01:38Z | - |
| dc.date.available | 2011-12-15T01:01:38Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69016&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50099 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1994.2, [ v, 105 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Silicon hydride. | - |
| dc.title | PEVED 법에 의한 μC-Si:H 박막의 성장과 a-Si 박막의 고상결정화 | - |
| dc.title.alternative | Growth of μC-Si films and solid phase recrystallization of a-Si films deposited by PECVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 69016/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000885137 | - |
| dc.contributor.localauthor | 문대규 | - |
| dc.contributor.localauthor | Moon, Dae-Gyu | - |
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