플라즈마 화학증착으로 제조한 수소함유 비정질 탄소의 증착기구와 특성의 상호관계에 관한 연구A study on the interrelation between deposition mechanism and characteristics of hydragenated amorphous carbon prepared by plasma chemical vapor deposition
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 61580/325007 / 000845043
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ viii, 135 p. ]
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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