열산화 조건과 열처리 조건이 Silicon 위에 형성한 tantalum oxide 의 성질에 미치는 영향Effects of oxidation and annealing conditions on the properties of tantalum oxide films on silicon substrates
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 임호빈 | - |
| dc.contributor.advisor | Im, Ho-Bin | - |
| dc.contributor.author | 박성욱 | - |
| dc.contributor.author | Park, Sung-Wook | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=59867&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49941 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1992.2, [ iv, [101] p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 산화탄탈 | - |
| dc.subject | Tantalum oxides | - |
| dc.title | 열산화 조건과 열처리 조건이 Silicon 위에 형성한 tantalum oxide 의 성질에 미치는 영향 | - |
| dc.title.alternative | Effects of oxidation and annealing conditions on the properties of tantalum oxide films on silicon substrates | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 59867/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000825110 | - |
| dc.contributor.localauthor | 박성욱 | - |
| dc.contributor.localauthor | Park, Sung-Wook | - |
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- MS-Theses_Ph.D.(박사논문)
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