반응성 동시 스퍼터링에 의한 Pb(Zr, Ti)$O_3$ 박막의 제조 및 구조적, 전기적 물성에 관한 연구Preparation of Pb(Zr, Ti)$O_3$ thin films by reactive cosputtering and their structural and electrical properties
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주옹길 | - |
| dc.contributor.advisor | Choo, Woong-Kil | - |
| dc.contributor.author | 김광영 | - |
| dc.contributor.author | Kim, Kwang-Young | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60676&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49905 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1993.2, [ vi, 155 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | PZT (Lead zirconium titanate) | - |
| dc.title | 반응성 동시 스퍼터링에 의한 Pb(Zr, Ti)$O_3$ 박막의 제조 및 구조적, 전기적 물성에 관한 연구 | - |
| dc.title.alternative | Preparation of Pb(Zr, Ti)$O_3$ thin films by reactive cosputtering and their structural and electrical properties | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 60676/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000825028 | - |
| dc.contributor.localauthor | 김광영 | - |
| dc.contributor.localauthor | Kim, Kwang-Young | - |
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