ALD 방법으로 형성된 다층 절연박막의 설계 및 특성에 관한 연구A study on the design and characterization of dielectric multilayer stacks prepared by atomic layer deposition method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 박광철 | - |
| dc.contributor.author | Park, Kwang-Chol | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=327749&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49722 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2009. 8., [ x, 133 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Silicon Oxide | - |
| dc.subject | Aluminum Oxide | - |
| dc.subject | Atomic layer deposition | - |
| dc.subject | Conduction Mechanism | - |
| dc.subject | Defect | - |
| dc.subject | 원자층 증착 방법 | - |
| dc.subject | 전도기구 | - |
| dc.subject | 구조결함 | - |
| dc.title | ALD 방법으로 형성된 다층 절연박막의 설계 및 특성에 관한 연구 | - |
| dc.title.alternative | A study on the design and characterization of dielectric multilayer stacks prepared by atomic layer deposition method | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 327749/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020055829 | - |
| dc.contributor.localauthor | 박광철 | - |
| dc.contributor.localauthor | Park, Kwang-Chol | - |
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