학위논문(박사) - 한국과학기술원 : 신소재공학과, 2007.2, [ ix, 143 p. ]
유전상수; 상변이; 나노복합막; 하프늄/알루미늄 옥사이드; 원자층 증착법; dielectric constant; phase transition; nanolamination; atomic layer deposition
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