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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Silicon nitride 화학 증착에서 증착 기구와 계면 전하 및 trap density 에 관한 연구 = A study on the chemical vapor deposition of silicon nitride and the characteristics of interfacial charge and trap densitylink 이경수; Yi, Kyoung-Soo; 천성순; Chun, Soung-Soon, 한국과학기술원, 1987 |
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