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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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TiC 화학증착과 TiN 플라즈마 화학증착의 증착기구 및 증착층의 특성에 관한 연구 = The deposition characteristics and structural properties of TiC deposited by chemical vapour deposition and TiN deposited by plasma enhanced chemical vapour depositionlink 장동훈; Jang, Dong-Hoon; 천성순; Chun, Soung-Soon, 한국과학기술원, 1988 |
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