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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Kinetic model for cavity filling in CECVD of copper = 촉매 처리에 의한 구리 CECVD의 cavity filling 현상에 관한 모델link

Lee, Hyun-Bae; 이현배; Kang, Sang-Won; 강상원, 한국과학기술원, 2005

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