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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
(A) study on plasma-enhanced atomic layer deposition of Ta-Si-O thin films = 탄탈륨 실리콘 산화막의 플라즈마 원자층 증착법에 관한 연구link

Song, Hyun-Jung; 송현정; Kang, Sang-Won; 강상원, 한국과학기술원, 2003

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