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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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(A) study on the kinetic model the thin film growth in ALD = ALD 박막 성장에 관한 동역학적 model 연구link Lim, Jung-Wook; 임정욱; Kang, Sang-Won; 강상원, 한국과학기술원, 2001 |
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