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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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ECR-PECVD PZT 박막의 FRAM 소자로의 응용에 관한 연구 = The study on the applicaions to FRAM with PZT thin film fabricated by ECR-PECVDlink 정수옥; Chung, Su-Ock; 이원종; 천성순; Lee, Won-Jong; Chun, Soung-Soon, 한국과학기술원, 2000 |