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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Characteristics of fluorinated amorphous carbon thin film deposited using ICP-CVD as a low dielectric interlayer dielectrics = ICP-CVD를 이용하여 증착한 저유전율 층간절연 박막용 불소함유 비정질 박막의 특성link Han, Sang-Soo; 한상수; Bae, Byeong-Soo; 배병수, 한국과학기술원, 2001 |